SPUTTERER
CHEMISTRY DEPARTMENT
SPUTTERER SPELCO SC-7
Technical Description:
Cylindrical chamber of 4.75’’ diameter by 4.75’’ height.
A 57 mm x 0.1 mm thick target can be used with Au, Au:Pd, Pt, Pt:Pd.
Film thickness is controlled by automatic timer.
Argon gas used to purge the system in conjunction with vacuum pump.
Located in McGowan South 312
Scheduling
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Contact
Department of Chemistry
DePaul University