DePaul

SPUTTERER

 

CHEMISTRY DEPARTMENT

 

SPUTTERER SPELCO SC-7
Sputterer

 

Technical Description:

    • Cylindrical chamber of 4.75’’ diameter by 4.75’’ height.
    • A 57 mm x 0.1 mm thick target can be used with Au, Au:Pd, Pt, Pt:Pd.
    • Film thickness is controlled by automatic timer.
    • Argon gas used to purge the system in conjunction with vacuum pump.

Located in McGowan South 312
 

 
 
 
 
 
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Department of Chemistry
DePaul University